An all-polymer spring optomechanical-microresonator-based ultrasonic sensor

Bo Dong; Senpeng Zhang; Zongyu Chen; Pofeng Lin; Wobin Huang

doi:10.1117/12.3037460

27 November 2024 An all-polymer spring optomechanical-microresonator-based ultrasonic sensor

Bo Dong, Senpeng Zhang, Zongyu Chen, Pofeng Lin, Wobin Huang

Author Affiliations +

Proceedings Volume 13236, Optoelectronic Devices and Integration XIII; 1323603 (2024) https://doi.org/10.1117/12.3037460
Event: SPIE/COS Photonics Asia, 2024, Nantong, Jiangsu, China

Abstract

An all-polymer spring optomechanical microresonator based ultrasonic sensor is presented. The microresonator is an all-polymer structure with a micro-disk and a cylindrical waveguide based microcavity. Experiment results show that its sensitivity is 987.8 times that of the commercial acoustic sensor at 200KHz, and its acoustic frequency response range is within 50KHz-400KHz. It shows the advantages of smart structure, high sensitivity, and wideband response, and it is expected to have wide applications in smart grid, biomedicine and medical ultrasound imaging.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Bo Dong, Senpeng Zhang, Zongyu Chen, Pofeng Lin, and Wobin Huang "An all-polymer spring optomechanical-microresonator-based ultrasonic sensor", Proc. SPIE 13236, Optoelectronic Devices and Integration XIII, 1323603 (27 November 2024); https://doi.org/10.1117/12.3037460

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