4-inch Fizeau interferometer transfer function measurement method

Jiaqi Qin; Yuhang Shen; Sen Han; Liwei Zhang; Ying Yang; Linji Ji; Chengliang Fu; Yanjun Wang

doi:10.1117/12.3035270

20 November 2024 4-inch Fizeau interferometer transfer function measurement method

Jiaqi Qin, Yuhang Shen, Sen Han, Liwei Zhang, Ying Yang, Linji Ji, Chengliang Fu, Yanjun Wang

Proceedings Volume 13241, Optical Metrology and Inspection for Industrial Applications XI; 132411H (2024) https://doi.org/10.1117/12.3035270
Event: SPIE/COS Photonics Asia, 2024, Nantong, Jiangsu, China

Conference Poster

Abstract

This paper conducts research on the instrument transfer function(ITF) of a 4-inch Fizeau interferometer. It first introduces the concept and principle of the ITF and investigates its measurement methods. Experimental measurements and analyses are carried out on the 4-inch Fizeau interferometer, utilizing both sinusoidal grating and simulated grating to compare and analyze the test results of the ITF. Furthermore, an error analysis is conducted based on these results.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Jiaqi Qin, Yuhang Shen, Sen Han, Liwei Zhang, Ying Yang, Linji Ji, Chengliang Fu, and Yanjun Wang "4-inch Fizeau interferometer transfer function measurement method", Proc. SPIE 13241, Optical Metrology and Inspection for Industrial Applications XI, 132411H (20 November 2024); https://doi.org/10.1117/12.3035270

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