Displacement measurement using grating images detected by CCD image sensor

Kazuhiro Hane; Chander Prakash Grover

doi:10.1117/12.51109

1 January 1991 Displacement measurement using grating images detected by CCD image sensor

Kazuhiro Hane, Chander Prakash Grover

Proceedings Volume 1332, Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection; (1991) https://doi.org/10.1117/12.51109
Event: 34th Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1990, San Diego, CA, United States

Abstract

Recently, the interference phenomenon known as grating imaging has been studied for some practical applications as well as for the theoretical interest. When the object grating, which is illuminated incoherently, is located in the vicinity of the transmission grating, the magnified image of the object grating is obtained at the image distances far from the gratings. Since the high magnification (%.lO2 to 1O) can be obtained, the image displacement is very sensitive to that of the object. We propose here a displacement sensing technique using the grating images detected by CCD image sensor. The images are processed with a computer by using a spatial phase detection method. The lateral displacement and the distance separating the two gratings can be obtained simultaneously and separately. The proposed technique will be useful as a compact two dimentional displacement sensing method in opto-mechanical systems.

Citation Download Citation

Kazuhiro Hane and Chander Prakash Grover "Displacement measurement using grating images detected by CCD image sensor", Proc. SPIE 1332, Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection, (1 January 1991); https://doi.org/10.1117/12.51109

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