Numerical investigation of effect of dynamic range and nonlinearity of detector on phase-stepping holographic interferometry

Qiang Fang; Xiangyang Luo; Yushan Tan

doi:10.1117/12.51071

1 January 1991 Numerical investigation of effect of dynamic range and nonlinearity of detector on phase-stepping holographic interferometry

Qiang Fang, Xiangyang Luo, Yushan Tan

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Proceedings Volume 1332, Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection; (1991) https://doi.org/10.1117/12.51071
Event: 34th Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1990, San Diego, CA, United States

Abstract

The effect of imperfectness of detector's characteristics on measurement accuracy in phase-stepping interferometry is investigated by numerical stimulation method. Based on the results, the determination method of system parameters to achieve desired accuracy requrement is discussed.

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Qiang Fang, Xiangyang Luo, and Yushan Tan "Numerical investigation of effect of dynamic range and nonlinearity of detector on phase-stepping holographic interferometry", Proc. SPIE 1332, Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection, (1 January 1991); https://doi.org/10.1117/12.51071

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