Paper
1 January 1992 Automatic interferometric evaluation of tool decentration for diamond-turned optics
Delvin A. Lindley
Author Affiliations +
Abstract
The proper centering of the cutting tool's motion with respect to the spindle axis is essential for the generation of programmed surface figures on turned optical components. The tool centering error, or decentration error, is decomposed into horizontal and vertical displacements. Horizontal decentration imparts a conical figure error to programmed spherical surfaces. Visual interferometric analysis of this figure has been used to estimate the magnitude and sign of this offset. Vertical decentration cannot be estimated by fringe pattern analysis since it does not generate a significant figure error. Here the application of phase measuring interferometry is suggested to obtain automatic estimates of these errors. The horizontal error is obtained by fitting a simple radial polynomial to the phase data. The vertical offset is derived from the extent of a poorly modulated central zone.
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Delvin A. Lindley "Automatic interferometric evaluation of tool decentration for diamond-turned optics", Proc. SPIE 1531, Advanced Optical Manufacturing and Testing II, (1 January 1992); https://doi.org/10.1117/12.134856
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KEYWORDS
Interferometry

Error analysis

Visualization

Phase measurement

Optical testing

Optics manufacturing

Single point diamond turning

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