Antireflection coatings of sputter-deposited SnOxFy and SnNxFy

Zhiqiang Yin; B. A. Stjerna; Claes-Goeran Granqvist

doi:10.1117/12.49220

1 December 1991 Antireflection coatings of sputter-deposited SnO_xF_y and SnN_xF_y

Zhiqiang Yin, B. A. Stjerna, Claes-Goeran Granqvist

Proceedings Volume 1536, Optical Materials Technology for Energy Efficiency and Solar Energy Conversion X; (1991) https://doi.org/10.1117/12.49220
Event: San Diego, '91, 1991, San Diego, CA, United States

Abstract

Films of SnO_xF_y and SnN_xF_y were made by reactive rf magnetron sputtering at rates up to on the order of magnitude 50 nm/min. They have refractive indices of on the order of magnitude 1.7 and are useful for antireflecting metal-oxide-coated substrates. Spectral optical data, showing the antireflection property, are given for SnO_x/SnO_xF_y and SnO_x/SnN_xF_y tandem layers.

Citation Download Citation

Zhiqiang Yin, B. A. Stjerna, and Claes-Goeran Granqvist "Antireflection coatings of sputter-deposited SnO_xF_y and SnN_xF_y", Proc. SPIE 1536, Optical Materials Technology for Energy Efficiency and Solar Energy Conversion X, (1 December 1991); https://doi.org/10.1117/12.49220

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