Computer-controlled polishing to fabricate special optics

Volkmar Giggel; Armin Leitel

doi:10.1117/12.57739

1 April 1992 Computer-controlled polishing to fabricate special optics

Volkmar Giggel, Armin Leitel

Proceedings Volume 1573, Commercial Applications of Precision Manufacturing at the Sub-Micron Level; (1992) https://doi.org/10.1117/12.57739
Event: SIRA, 1991, London, United Kingdom

Abstract

For high-resolution optical imaging systems used in photolithography, lenses with diameters up to 200 mm and surface accuracies of about 25 nm are required. To realize an economic production of such elements, a computer-controlled polishing following classical techniques has been developed. Applications in the laboratory and production spheres are presented for components made from Zerodur, optical glasses and calcium fluoride.

Citation Download Citation

Volkmar Giggel and Armin Leitel "Computer-controlled polishing to fabricate special optics", Proc. SPIE 1573, Commercial Applications of Precision Manufacturing at the Sub-Micron Level, (1 April 1992); https://doi.org/10.1117/12.57739

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