Paper
1 October 1991 Diffractive optics for x rays: the state of the art
Alan G. Michette
Author Affiliations +
Proceedings Volume 1574, Intl Colloquium on Diffractive Optical Elements; (1991) https://doi.org/10.1117/12.50111
Event: International Colloquium on Diffractive Optical Elements, 1991, Szklarska Poreba, Poland
Abstract
In terms of achievable spatial resolutions, the most successful optics used to date for x-ray imaging have been zone plates that can be now be made with outermost zone widths of less than 25 nm. Techniques for the manufacture of these optical elements are reviewed and potential future improvements are considered. Some recent applications of zone plate optics are discussed.
© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Alan G. Michette "Diffractive optics for x rays: the state of the art", Proc. SPIE 1574, Intl Colloquium on Diffractive Optical Elements, (1 October 1991); https://doi.org/10.1117/12.50111
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Cited by 1 scholarly publication.
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KEYWORDS
Zone plates

X-rays

Contamination

Diffraction

Optics manufacturing

Lithography

X-ray imaging

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