Spectroscopic infrared ellipsometry

A. Roseler

doi:10.1117/12.56467

1 March 1992 Spectroscopic infrared ellipsometry

A. Roseler

Proceedings Volume 1575, 8th Intl Conf on Fourier Transform Spectroscopy; (1992) https://doi.org/10.1117/12.56467
Event: Eighth International Conference on Fourier Transform Spectroscopy, 1991, Lubeck-Travemunde, Germany

Abstract

The spectroscopic infrared ellipsometry (SIRE) by means of the combination of a photometric ellipsometer with a Fourier transform spectrometer is used to measure optical properties in the infrared. From the observed four Stokes parameters, the spectrum of the degree of polarization after the reflection at the sample is calculated and discussed.

Citation Download Citation

A. Roseler "Spectroscopic infrared ellipsometry", Proc. SPIE 1575, 8th Intl Conf on Fourier Transform Spectroscopy, (1 March 1992); https://doi.org/10.1117/12.56467

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