Fabrication and characterization of a GaAs lateral optical switch with Ni/Ge/Au ohmic contacts

Robert J. Zeto; Charles D. Mulford; Wayne H. Chang; A. M. Balekdjian; Richard T. Lareau; S. N. Schauer; Fred J. Zutavern; Guillermo M. Loubriel

doi:10.1117/12.59065

12 May 1992 Fabrication and characterization of a GaAs lateral optical switch with Ni/Ge/Au ohmic contacts

Robert J. Zeto, Charles D. Mulford, Wayne H. Chang, A. M. Balekdjian, Richard T. Lareau, S. N. Schauer, Fred J. Zutavern, Guillermo M. Loubriel

Author Affiliations +

Proceedings Volume 1632, Optically Activated Switching II; (1992) https://doi.org/10.1117/12.59065
Event: OE/LASE '92, 1992, Los Angeles, CA, United States

Abstract

A process was developed for the fabrication of high power GaAs photoconductive switches with ohmic Ni/Ge/Au contact metallization in a lateral NIN switch configuration. The main features of the process were ion implanted silicon in the contact regions and rapid thermal processing for annealing the implants and alloying the metallization. A 50 mill dia. process wafer included 28 photolithographically defined switches of four different types to comparatively investigate the effects of ohmic contacts and switch dimensions on switch lifetime, together with monitors to characterize the ohmic contact process.

Citation Download Citation

Robert J. Zeto, Charles D. Mulford, Wayne H. Chang, A. M. Balekdjian, Richard T. Lareau, S. N. Schauer, Fred J. Zutavern, and Guillermo M. Loubriel "Fabrication and characterization of a GaAs lateral optical switch with Ni/Ge/Au ohmic contacts", Proc. SPIE 1632, Optically Activated Switching II, (12 May 1992); https://doi.org/10.1117/12.59065

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available