Fabrication and testing of metal micromechanisms with rotational and translational motion

Henry Guckel; Todd R. Christenson; Kenneth J. Skrobis

doi:10.1117/12.138117

1 July 1992 Fabrication and testing of metal micromechanisms with rotational and translational motion

Henry Guckel, Todd R. Christenson, Kenneth J. Skrobis

Proceedings Volume 1694, Sensors and Sensor Systems for Guidance and Navigation II; (1992) https://doi.org/10.1117/12.138117
Event: Aerospace Sensing, 1992, Orlando, FL, United States

Abstract

Microactuators ideally produce large output forces per unit chip area. This requires processing procedures which lend themselves to structures with large structural heights. Processing which also produces large edge acuities is required for low friction, low wear sliding bearing surfaces. Both attributes are accommodated in a processing sequence which uses thick photoresist technology, X-ray exposure, and metal plating together with a surface micromachined sacrificial layer. The end results are thick precision metal structures which can be assembled to achieve submicron tolerances in sliding bearing surfaces. The process has been used to fabricate rotational planar magnetic micromotors with low friction. Linear reluctance drives with spring returns have also been achieved and are in the testing phase.

Citation Download Citation

Henry Guckel, Todd R. Christenson, and Kenneth J. Skrobis "Fabrication and testing of metal micromechanisms with rotational and translational motion", Proc. SPIE 1694, Sensors and Sensor Systems for Guidance and Navigation II, (1 July 1992); https://doi.org/10.1117/12.138117

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available