Ferroelectric thin film materials, structures, and microsensors

Dennis L. Polla; T. Tamagawa; Chian-Ping Ye; P. J. Schiller; Linda Pham; Cuong Y. Tu

doi:10.1117/12.138119

1 July 1992 Ferroelectric thin-film materials, structures, and microsensors

Dennis L. Polla, T. Tamagawa, Chian-Ping Ye, P. J. Schiller, Linda Pham, Cuong Y. Tu

Proceedings Volume 1694, Sensors and Sensor Systems for Guidance and Navigation II; (1992) https://doi.org/10.1117/12.138119
Event: Aerospace Sensing, 1992, Orlando, FL, United States

Abstract

The paper describes the integration of sol-gel ferroelectric thin films into micromachined sensors and optical detectors, devices which are based on the piezoelectric and pyroelectric effects in Pb(Zr(x)Ti(1-x))O3 and PbTiO3 thin films, respectively. The ferroelectric and surface-micromachining technologies are described, which are compatible with 3-micron CMOS technology. At 297 K and a chopping frequency of 50 Hz, the measured blackbody voltage responsivity of a pyroelectric element with an active area of 7 x 10 exp -4 sq cm was 4.2 x 10 exp 4 V/W and the measured normalized detectivity was 1.0 x 10 exp 9 cm sq-rt Hz/W.

Citation Download Citation

Dennis L. Polla, T. Tamagawa, Chian-Ping Ye, P. J. Schiller, Linda Pham, and Cuong Y. Tu "Ferroelectric thin-film materials, structures, and microsensors", Proc. SPIE 1694, Sensors and Sensor Systems for Guidance and Navigation II, (1 July 1992); https://doi.org/10.1117/12.138119

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