Analysis of zone-plate interference fringe pattern

Kazuhide Kamiya; Takashi Nomura; Hiroshi Miyashiro; Kazuo Yoshikawa; Hatsuzo Tashiro; Shigeo Ozono; Masane Suzuki

doi:10.1117/12.132138

20 October 1992 Analysis of zone-plate interference fringe pattern

Kazuhide Kamiya, Takashi Nomura, Hiroshi Miyashiro, Kazuo Yoshikawa, Hatsuzo Tashiro, Shigeo Ozono, Masane Suzuki

Proceedings Volume 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation; (1992) https://doi.org/10.1117/12.132138
Event: International Symposium on Optical Fabrication, Testing, and Surface Evaluation, 1992, Tokyo, Japan

Abstract

The zone-plate interference fringe pattern is analyzed by FFT. The spectrum obtained by FFT contains information on the shape error. To select the information on the shape error from the spectrum of the fringe pattern is difficult, because the resolution of the spectrum is low. An FFT with over-sampling is applied to increase the spectrum resolution. A method is proposed to select the necessary information from the spectrum of the fringe pattern. Experimental results obtained by the proposed method agree well with those obtained by Fizeau interferometer.

Citation Download Citation

Kazuhide Kamiya, Takashi Nomura, Hiroshi Miyashiro, Kazuo Yoshikawa, Hatsuzo Tashiro, Shigeo Ozono, and Masane Suzuki "Analysis of zone-plate interference fringe pattern", Proc. SPIE 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation, (20 October 1992); https://doi.org/10.1117/12.132138

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