Fabrication and evaluation of Cr-C multilayer mirrors for soft x rays

Masahito Niibe; Masami Tsukamoto; Takashi Iizuka; Akira Miyake; Yutaka Watanabe; Yasuaki Fukuda

doi:10.1117/12.132127

20 October 1992 Fabrication and evaluation of Cr-C multilayer mirrors for soft x rays

Masahito Niibe, Masami Tsukamoto, Takashi Iizuka, Akira Miyake, Yutaka Watanabe, Yasuaki Fukuda

Proceedings Volume 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation; (1992) https://doi.org/10.1117/12.132127
Event: International Symposium on Optical Fabrication, Testing, and Surface Evaluation, 1992, Tokyo, Japan

Abstract

We have selected Cr and C as a material pair of multilayer (ML) mirrors for soft x rays at the wavelength near 5 nm. The Cr-C ML structures have successfully been fabricated with rf- magnetron sputtering. The ML structures have been characterized with transmission electron microscopy (TEM), x-ray diffraction, and reflectivity measurement by SR light. From the observation of TEM images, Cr-C MLs had uniform and less-defective layered structures with the d-spacing down to 2.4 nm. Reflectivities at normal and grazing incidence were remarkably decreased with decreasing the ML d-spacing. Normal incidence reflectivity at 5 nm was as high as 7%. The regularity of the d-spacing of the MLs was evaluated with a moire image that was formed by putting a reference stripe pattern on the cross-sectional TEM micrograph. Compared to Ni-C MLs, Cr-C is a preferable material combination for x-ray mirrors for shorter wavelength and normal incidence.

Citation Download Citation

Masahito Niibe, Masami Tsukamoto, Takashi Iizuka, Akira Miyake, Yutaka Watanabe, and Yasuaki Fukuda "Fabrication and evaluation of Cr-C multilayer mirrors for soft x rays", Proc. SPIE 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation, (20 October 1992); https://doi.org/10.1117/12.132127

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