Oblique incidence interferometry for gear-tooth surface profiling

Tomomi Ino; Toyohiko Yatagai

doi:10.1117/12.132156

20 October 1992 Oblique incidence interferometry for gear-tooth surface profiling

Tomomi Ino, Toyohiko Yatagai

Proceedings Volume 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation; (1992) https://doi.org/10.1117/12.132156
Event: International Symposium on Optical Fabrication, Testing, and Surface Evaluation, 1992, Tokyo, Japan

Abstract

An oblique incidence interferometer for measuring a non-optical surface of a gear tooth with a phase shifting method is developed. The incidence angle of a He-Ne laser is set to be 84.75 degree(s) with a wedge prism, to obtain fringe spacing corresponding to the height of 3.64 micrometers . The reference beam is piezo-electrically modulated to make phase shifting fringe analysis. A high resolution CCD camera with resolution of 1280 X 1024 is used so that about 200 fringes can be analyzed. The maximum deviation of about 420 micrometers from a plane reference surface is measured with an accuracy of 40 nm.

Citation Download Citation

Tomomi Ino and Toyohiko Yatagai "Oblique incidence interferometry for gear-tooth surface profiling", Proc. SPIE 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation, (20 October 1992); https://doi.org/10.1117/12.132156

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