X-ray multilayer mirrors for grazing incidence

Masaaki Sudoh; Katsunobu Ueda; Shinichi Nakamura; Hirobumi Ohmori

doi:10.1117/12.132126

20 October 1992 X-ray multilayer mirrors for grazing incidence

Masaaki Sudoh, Katsunobu Ueda, Shinichi Nakamura, Hirobumi Ohmori

Proceedings Volume 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation; (1992) https://doi.org/10.1117/12.132126
Event: International Symposium on Optical Fabrication, Testing, and Surface Evaluation, 1992, Tokyo, Japan

Abstract

Material pairs of Re/Al, Re/Mg, Re/B, Pt/B, and Pt/C were selected for grazing incidence multilayer mirrors having a high reflectance for about 1 nm wavelength x ray. The multilayers were fabricated by electron beam deposition and Knudsen cell heating deposition, and were evaluated as to whether or not they had a periodic structure and stability in atmospheric storage. A periodic structure was observed in the transmission electron micrograph for the Pt/C and the Re/B multilayers, although the Re/B multilayer was found to have a decay after a month of fabrication. This decay was caused by the formation of an Re oxide as judged from the x-ray photoelectron spectroscopy analysis.

Citation Download Citation

Masaaki Sudoh, Katsunobu Ueda, Shinichi Nakamura, and Hirobumi Ohmori "X-ray multilayer mirrors for grazing incidence", Proc. SPIE 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation, (20 October 1992); https://doi.org/10.1117/12.132126

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