Absolute measurements of 3D shape using white-light interferometer

Masahide Itoh; Ronglong Tian; Toyohiko Yatagai

doi:10.1117/12.140782

5 February 1993 Absolute measurements of 3D shape using white-light interferometer

Masahide Itoh, Ronglong Tian, Toyohiko Yatagai

Proceedings Volume 1755, Interferometry: Techniques and Analysis; (1993) https://doi.org/10.1117/12.140782
Event: San Diego '92, 1992, San Diego, CA, United States

Abstract

In the Twyman-Green type interferometer the absolute height of a sample can be measured using a broad-band light source. The reference mirror is scanned along the optical axis to detect the point that the optical path difference is zero. We can obtain a three dimensional contour map without restricting 2(pi) phase unwrap. We constructed an interferometric system using a white-light as a light source and measured a step of 20 micrometers .

Citation Download Citation

Masahide Itoh, Ronglong Tian, and Toyohiko Yatagai "Absolute measurements of 3D shape using white-light interferometer", Proc. SPIE 1755, Interferometry: Techniques and Analysis, (5 February 1993); https://doi.org/10.1117/12.140782

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