Submicron optical ranging of nanometric particles in semiconductor materials

Michel Castagne; Jean-Pierre Fillard; Jean-Marc Lussert; H. M'timet

doi:10.1117/12.139024

29 December 1992 Submicron optical ranging of nanometric particles in semiconductor materials

Michel Castagne, Jean-Pierre Fillard, Jean-Marc Lussert, H. M'timet

Proceedings Volume 1767, Inverse Problems in Scattering and Imaging; (1992) https://doi.org/10.1117/12.139024
Event: San Diego '92, 1992, San Diego, CA, United States

Abstract

Semiconductor materials (bulk material as well as epilayers) contain grown-in defects such as nanometric microprecipitates. These particles play a dramatic role in the electrical specifications of the devices. A new method of investigating the vertical position of these defects in the IC or OEIC layered structures is proposed. It stems from the 3D observation of defocused Point Spread Functions arising from the illumination of these small scattering defects. The calculation of the Fourier transform is numerically performed and the z position of the point sources is deduced from the Fourier Phase Shift. This method is capable of sub- micron measurement. Numerical simulations as well as experimental illustrations are presented which confirm the potential of the method.

Citation Download Citation

Michel Castagne, Jean-Pierre Fillard, Jean-Marc Lussert, and H. M'timet "Submicron optical ranging of nanometric particles in semiconductor materials", Proc. SPIE 1767, Inverse Problems in Scattering and Imaging, (29 December 1992); https://doi.org/10.1117/12.139024

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available