Laser coalescence of gold clusters in gold-fluorocarbon composite films

Paul B. Comita; W. Jacob; E. Kay; Ron Zhang

doi:10.1117/12.142088

16 March 1993 Laser coalescence of gold clusters in gold-fluorocarbon composite films

Paul B. Comita, W. Jacob, E. Kay, Ron Zhang

Proceedings Volume 1804, Rapid Thermal and Laser Processing; (1993) https://doi.org/10.1117/12.142088
Event: Microelectronic Processing '92, 1992, San Jose, CA, United States

Abstract

The formation of conducting films from composite films comprised of gold clusters in plasma polymerized polyfluorocarbon (PPFC) is described. A focussed, visible laser beam is used to coalesce the gold clusters within the PPFC matrix. Heating the composite with the laser causes the film to collapse with a loss of weight due to decomposition and volatilization of the polymer. Under the appropriate laser power and scanning conditions, coalescence of the gold particles results in a conducting metal line, exhibiting close to bulk metal resistivity.

Citation Download Citation

Paul B. Comita, W. Jacob, E. Kay, and Ron Zhang "Laser coalescence of gold clusters in gold-fluorocarbon composite films", Proc. SPIE 1804, Rapid Thermal and Laser Processing, (16 March 1993); https://doi.org/10.1117/12.142088

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