Cost-effective mask inspection system

Damayanti C. Gharpure; Sunil K. David

doi:10.1117/12.132092

1 November 1992 Cost-effective mask inspection system

Damayanti C. Gharpure, Sunil K. David

Proceedings Volume 1823, Machine Vision Applications, Architectures, and Systems Integration; (1992) https://doi.org/10.1117/12.132092
Event: Applications in Optical Science and Engineering, 1992, Boston, MA, United States

Abstract

Machine vision techniques are spanning a number of application domains. This paper presents a successful attempt of using these techniques for interpretation and manipulation of engineering drawings. Microfilming technique is widely used for archiving and increasing the portability of engineering drawings. Retrieval of these drawings for further modifications and updating is a cumbersome task. CAD tools cannot be used for this purpose as these drawings do not cater to the required format. A simple PC based machine vision system, which acts as an interface for converting the microfilmed drawings into a file accessible by the specific CAD tool is described. Image analysis routines have been used for contour tracking, detection of critical points, determining orientation, length, perimeter, etc. Features of each individual pattern are extracted for creating a database. The user is provided an option of choosing the specific CAD tool and a file in accordance with the format required by the CAD tool is generated from the database. The paper deals with the software developed and reports the results obtained.

Citation Download Citation

Damayanti C. Gharpure and Sunil K. David "Cost-effective mask inspection system", Proc. SPIE 1823, Machine Vision Applications, Architectures, and Systems Integration, (1 November 1992); https://doi.org/10.1117/12.132092

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