Experimental investigation of factors that restrict the gas lifetime in excimer KrF lasers

George M. Chumak; V. V. Nazarov; M. M. Smirnova

doi:10.1117/12.143045

19 April 1993 Experimental investigation of factors that restrict the gas lifetime in excimer KrF lasers

George M. Chumak, V. V. Nazarov, M. M. Smirnova

Proceedings Volume 1835, Excimer Lasers: Applications, Beam Delivery Systems, and Laser Design; (1993) https://doi.org/10.1117/12.143045
Event: Applications in Optical Science and Engineering, 1992, Boston, MA, United States

Abstract

The results of experimental investigation of factors which restrict the gas lifetime in pulsed discharge KrF laser have been presented. The correlation in between gas mixture lifetime and constant rate of fluorine concentration decrease has been observed. It has been determined that the main canal of fluorine concentration decrease is the reaction of formation of metal fluorides of electrodes. Compositions of gas phase impurities of laser mixture which are formed during the laser operating and their influence on the characteristics of laser emission have been ascertained. An absence of appreciable influence of absorption and scattering of laser emission by impurities has been revealed. The mechanism of influence of solid-state impurities on lasing energy has been suggested.

Citation Download Citation

George M. Chumak, V. V. Nazarov, and M. M. Smirnova "Experimental investigation of factors that restrict the gas lifetime in excimer KrF lasers", Proc. SPIE 1835, Excimer Lasers: Applications, Beam Delivery Systems, and Laser Design, (19 April 1993); https://doi.org/10.1117/12.143045

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available