Effect of lens aberration on oblique-illumination stepper system

Pei-yang Yan; Qi-De Qian; Joseph C. Langston

doi:10.1117/12.150422

8 August 1993 Effect of lens aberration on oblique-illumination stepper system

Pei-yang Yan, Qi-De Qian, Joseph C. Langston

Proceedings Volume 1927, Optical/Laser Microlithography; (1993) https://doi.org/10.1117/12.150422
Event: SPIE'S 1993 Symposium on Microlithography, 1993, San Jose, CA, United States

Abstract

In this paper, detailed simulation and some experimental studies on stepper lens aberration effect in the case of oblique illumination source are presented. The results are compared to that of conventional illumination source. Due to the unique feature of oblique illumination source imaging, i.e., imaging by using only zero and first diffraction order light, both stepper resolution limit and depth of focus (DOF) are extended. As a result, the effect of lens aberration in resist printing are also different from that of conventional illumination source. Unlike the conventional illumination source, the net effect of stepper lens aberration in resist printing depends not only on both the amount and type of the lens aberration, but also on the mask feature pattern. In the case of lens distortion, unlike the other types of lens aberration, the oblique illumination source does not show any improvement as compared to that of conventional illumination source. It does not show pattern dependent distortion either. In the experiment, an effect of a stepper lens aberration in resist printing for both conventional illumination and quadrapole illumination sources (mostly astigmatism) were measured. The results were in agreement with our simulation results.

Citation Download Citation

Pei-yang Yan, Qi-De Qian, and Joseph C. Langston "Effect of lens aberration on oblique-illumination stepper system", Proc. SPIE 1927, Optical/Laser Microlithography, (8 August 1993); https://doi.org/10.1117/12.150422

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available