Detection of errors in microlithographic grating fabrication

M. Heissmeier

doi:10.1117/12.2308806

23 July 1993 Detection of errors in microlithographic grating fabrication

M. Heissmeier

Proceedings Volume 1983, 16th Congress of the International Commission for Optics: Optics as a Key to High Technology; 1983AR (1993) https://doi.org/10.1117/12.2308806
Event: 16th Congress of the International Commission for Optics: Optics as a Key to High Technology, 1993, Budapest, Hungary

Abstract

The rotation method for the absolute testing of three flatsl is extendet by adding a second rotation of one of the flats2. This means that altogether five inter- ferograms of pairs of flats (positional combinations) are evaluated: three basic combinations and two rotational combinations. The effect of random measuring errors is minimized by fully applying least-squares methods. Here the addition of the second rotation leads to a substantial increase of accuracy of the results and enables the lateral resolution to be further enhanced. Measurements using a special phase-stepping Fizeau-interferometer were carried out. Flats of 200 mm diameter were tested. The lateral resolution is about 1/100 of the plate diameter.

Citation Download Citation

M. Heissmeier "Detection of errors in microlithographic grating fabrication", Proc. SPIE 1983, 16th Congress of the International Commission for Optics: Optics as a Key to High Technology, 1983AR (23 July 1993); https://doi.org/10.1117/12.2308806

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