Quantitative wavefront measurement using a ronchi test with a phase-shifted sinusoidal grating

Kenichi Hibino

doi:10.1117/12.2308820

23 July 1993 Quantitative wavefront measurement using a ronchi test with a phase-shifted sinusoidal grating

Kenichi Hibino

Proceedings Volume 1983, 16th Congress of the International Commission for Optics: Optics as a Key to High Technology; 1983B5 (1993) https://doi.org/10.1117/12.2308820
Event: 16th Congress of the International Commission for Optics: Optics as a Key to High Technology, 1993, Budapest, Hungary

Abstract

Elastic scattering of light reflects an inhomogeneous interface between two media. Applied to surfaces the technique is sensitive to roughness levels in the sub-Angstrom region. This makes it an excellent tool for studying minute changes in the surface structure while processing materials. Examples are given of real-time total integrated scattering applied to stress analysis of metallization films and monitoring of thermal stability of silicides.

Citation Download Citation

Kenichi Hibino "Quantitative wavefront measurement using a ronchi test with a phase-shifted sinusoidal grating", Proc. SPIE 1983, 16th Congress of the International Commission for Optics: Optics as a Key to High Technology, 1983B5 (23 July 1993); https://doi.org/10.1117/12.2308820

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available