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An interferornetric proximity sensor is described, working on a set of four interference patterns in quadrature. The measuring algorithm precisely evaluates a phase angle, that is used to monitor the displacement of a test sample.
I. Kolev
"Lidar monitoring of air pollution in the low atmosphere", Proc. SPIE 1983, 16th Congress of the International Commission for Optics: Optics as a Key to High Technology, 1983C1 (23 July 1993); https://doi.org/10.1117/12.2308852
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I. Kolev, "Lidar monitoring of air pollution in the low atmosphere," Proc. SPIE 1983, 16th Congress of the International Commission for Optics: Optics as a Key to High Technology, 1983C1 (23 July 1993); https://doi.org/10.1117/12.2308852