Optical instrument for evaluation of rough machined-surface by angular distribution of scattered light

Czeslaw Lukianowicz

doi:10.1117/12.192017

31 October 1994 Optical instrument for evaluation of rough machined-surface by angular distribution of scattered light

Czeslaw Lukianowicz

Proceedings Volume 1991, Diffractometry and Scatterometry; (1994) https://doi.org/10.1117/12.192017
Event: International Conference on Diffractometry and Scatterometry, 1994, Warszawa, Poland

Abstract

In this paper a method and an instrument worked out for evaluating roughness of machined surfaces are presented. The main idea of the method is to light up surface by laser beam and then to record an angular distribution of intensity of scattered light. Based on angular distribution of scattered light some parameters and characteristics of surface roughness are determined. This instrument can be used for measurements of flat and rotary surfaces. The application of the instrument is in the fields of full automatic testing, nondestructive testing and continuous process control.

Citation Download Citation

Czeslaw Lukianowicz "Optical instrument for evaluation of rough machined-surface by angular distribution of scattered light", Proc. SPIE 1991, Diffractometry and Scatterometry, (31 October 1994); https://doi.org/10.1117/12.192017

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