Integrated waveguide device for magneto-optical disk signal detection and its fabrication techniques

Shunsuke Fujita; Tami Kihara; Magane Aoki; Akihiko Hiroe; Kiyoshi Yokomori

doi:10.1117/12.165682

15 December 1993 Integrated waveguide device for magneto-optical disk signal detection and its fabrication techniques

Shunsuke Fujita, Tami Kihara, Magane Aoki, Akihiko Hiroe, Kiyoshi Yokomori

Proceedings Volume 1992, Miniature and Micro-Optics and Micromechanics; (1993) https://doi.org/10.1117/12.165682
Event: SPIE's 1993 International Symposium on Optics, Imaging, and Instrumentation, 1993, San Diego, CA, United States

Abstract

We propose an integrated optical polarization detection device for magneto-optical disk pickups. The device has a prism coupler and a TE/TM mode splitter which is monolithically integrated on a silicon substrate with p-i-n photodiodes and two optical waveguides with different effective indices of refraction. These two waveguides are connected at two tapered transition regions. This paper describes the device fabrication techniques and the performance of each element integrated in the device. The optical waveguide TE/TM mode splitter is shown to have wide tolerance for wavelength change, fabrication error, or deviation from designed incident angle.

Citation Download Citation

Shunsuke Fujita, Tami Kihara, Magane Aoki, Akihiko Hiroe, and Kiyoshi Yokomori "Integrated waveguide device for magneto-optical disk signal detection and its fabrication techniques", Proc. SPIE 1992, Miniature and Micro-Optics and Micromechanics, (15 December 1993); https://doi.org/10.1117/12.165682

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