Paper
10 December 1993 Accuracy analysis of multiaperture overlap-scanning technique (MAOST)
Weiming Cheng, You-Lue Lin, Mingyi Chen
Author Affiliations +
Abstract
The accuracy of multi-aperture overlap-scanning technique (MAOST) is about (lambda) /50 with the new way to estimate the accuracy established in this paper. Two main factors to influence the accuracy, that is the connection mode and the overlap coefficient, are analyzed.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Weiming Cheng, You-Lue Lin, and Mingyi Chen "Accuracy analysis of multiaperture overlap-scanning technique (MAOST)", Proc. SPIE 2003, Interferometry VI: Techniques and Analysis, (10 December 1993); https://doi.org/10.1117/12.165463
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CITATIONS
Cited by 2 scholarly publications.
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KEYWORDS
Wavefronts

Interferometry

Krypton

Error analysis

Computer simulations

Metrology

Reliability

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