Paper
7 July 1993 30.4-nm narrowband multilayer reflection filters
Muamer Zukic, Jongmin Kim, Douglas G. Torr
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Abstract
We report designs of multilayer narrowband reflective 30.4 nm filters. The narrowband reflection filters are designed for angles of incidence (theta) o, ranging from 0 degree(s) - 30 degree(s). For example, the calculated reflectance of a 15-layer Au-Al multilayer which operates within the angular range 0 degree(s) <EQ (theta) o <EQ 10 degree(s) has for 0 degree(s) angle of incidence a reflectance peak value of 24% at 30.4 nm with a bandwidth of less than 5 nm. The average out-of-band reflectance is less than 2% for the wavelength range from 10 nm - 70 nm. Filters with more than 20% peak reflectance and less than 5 nm bandwidths are designed for incident angular cones from 0 degree(s) - 10 degree(s), 10 degree(s) - 20 degree(s).
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Muamer Zukic, Jongmin Kim, and Douglas G. Torr "30.4-nm narrowband multilayer reflection filters", Proc. SPIE 2008, Instrumentation for Magnetospheric Imagery II, (7 July 1993); https://doi.org/10.1117/12.147640
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KEYWORDS
Reflectivity

Multilayers

Optical filters

Cameras

Aluminum

Refractive index

Extreme ultraviolet

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