Studies toward the optimization of ion polishing for multilayer x-ray mirrors

Eberhard Adolf Spiller; Ki-Byoung Youn

doi:10.1117/12.167205

1 February 1994 Studies toward the optimization of ion polishing for multilayer x-ray mirrors

Eberhard Adolf Spiller, Ki-Byoung Youn

Proceedings Volume 2011, Multilayer and Grazing Incidence X-Ray/EUV Optics II; (1994) https://doi.org/10.1117/12.167205
Event: SPIE's 1993 International Symposium on Optics, Imaging, and Instrumentation, 1993, San Diego, CA, United States

Abstract

Multilayer mirrors of Co, Ni or Ru with spacer layer of C or B₄C are fabricated by electron-beam deposition with ion polishing of all metal layers. Improved performance over previous work is obtained for the mirrors containing Co and Ru. Very smooth boundaries are obtained for Ni films, however, this smoothness is only obtained for coatings with a small number of layers.

Citation Download Citation

Eberhard Adolf Spiller and Ki-Byoung Youn "Studies toward the optimization of ion polishing for multilayer x-ray mirrors", Proc. SPIE 2011, Multilayer and Grazing Incidence X-Ray/EUV Optics II, (1 February 1994); https://doi.org/10.1117/12.167205

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