Structural and optical properties of semiconductor heterojunctions and superlattices grown by pulsed-laser evaporation and epitaxy

Jan J. Dubowski

doi:10.1117/12.167548

1 February 1994 Structural and optical properties of semiconductor heterojunctions and superlattices grown by pulsed-laser evaporation and epitaxy

Jan J. Dubowski

Author Affiliations +

Proceedings Volume 2045, Laser-Assisted Fabrication of Thin Films and Microstructures; (1994) https://doi.org/10.1117/12.167548
Event: Optics Quebec, 1993, Quebec City, Canada

Abstract

Basic mechanisms of laser ablation and the most recent results of laser ablation research are discussed here with a focus on semiconductor materials. The pulsed laser evaporation and epitaxy (PLEE) method, which has been developed for epitaxial growth of Cd_1-xMn_xTe (CMT) thin films and CdTe-CMT multiple quantum wells and superlattices, is reviewed. This method of deposition is based on the application of Nd:YAG and XeCl excimer lasers which are exclusively used for the ablation of solid targets: no other vapor generation devices, such as Knudsen cells, are used in PLEE. Microstructures of CdTe- Cd_1-xMn_xTe (0 < x < 0.70) have been grown by the ablation of CdTe, Cd_1-xMn_xTe and Cd targets.

Citation Download Citation

Jan J. Dubowski "Structural and optical properties of semiconductor heterojunctions and superlattices grown by pulsed-laser evaporation and epitaxy", Proc. SPIE 2045, Laser-Assisted Fabrication of Thin Films and Microstructures, (1 February 1994); https://doi.org/10.1117/12.167548

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available