Measurement and rectification of the response characteristic of piezoelectric transducers

Ju-Xiang Wang; Zhu Li; Jiangming Ni; Xiandeng Pei

doi:10.1117/12.156292

22 September 1993 Measurement and rectification of the response characteristic of piezoelectric transducers

Ju-Xiang Wang, Zhu Li, Jiangming Ni, Xiandeng Pei

Proceedings Volume 2101, Measurement Technology and Intelligent Instruments; (1993) https://doi.org/10.1117/12.156292
Event: Measurement Technology and Intelligent Instruments, 1993, Wuhan, China

Abstract

The piezoelectric transducer ( PZT for short ) is widely used in precision measurement as an actuator or a sensor1 . While developing the noncontact measuring instrument of disk surface roughness we employed PZT as the actuator of phasemodulation. It has been confirmed that the actuator is satisfactory in realizing precision measurement of the surface roughness with roughness Ra from 0. 16 to 0. 01 m. This paper primarily presents the measurement and rectification of the response characteristics of PZT after briefly introducing the design and process. The experiments and analysis show that the linearity of the response characteristics could be improved to 1. 08 by applying a suitable series capacitor which gives good precision support for the instrument. KEY WORDS: Precision measurement Measuring technique Rectification

Citation Download Citation

Ju-Xiang Wang, Zhu Li, Jiangming Ni, and Xiandeng Pei "Measurement and rectification of the response characteristic of piezoelectric transducers", Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); https://doi.org/10.1117/12.156292

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