Excimer laser technology for soft x-ray generation

Michael F. Powers; Harry Shields

doi:10.1117/12.172728

1 June 1994 Excimer laser technology for soft x-ray generation

Michael F. Powers, Harry Shields

Proceedings Volume 2115, Visible and UV Lasers; (1994) https://doi.org/10.1117/12.172728
Event: OE/LASE '94, 1994, Los Angeles, CA, United States

Abstract

An angularly multiplexed XeCl excimer laser system, generating pulses of 4 - 5 ns duration, has been used to investigate soft x ray generation from laser-produced plasmas. For applications in x-ray lithography, the spectral regions of 10 - 15 angstrom and around 135 angstrom have been studied. A laser to x ray conversion efficiency of 5.5% and an x ray power of > 1 W into 2 (pi) steradians have been demonstrated in the shorter wavelength band. At the longer wavelength, the effects of laser intensity and plasma recombination on conversion efficiency have been studied.

Citation Download Citation

Michael F. Powers and Harry Shields "Excimer laser technology for soft x-ray generation", Proc. SPIE 2115, Visible and UV Lasers, (1 June 1994); https://doi.org/10.1117/12.172728

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