Spatially resolved electron-beam induced current transient spectroscopy for deep-center characterization of diamond

Karl H. Schoenbach; T. Tessnow; Ravindra P. Joshi; Randy A. Roush; Ralf Peter Brinkmann

doi:10.1117/12.171763

1 April 1994 Spatially resolved electron-beam induced current transient spectroscopy for deep-center characterization of diamond

Karl H. Schoenbach, T. Tessnow, Ravindra P. Joshi, Randy A. Roush, Ralf Peter Brinkmann

Author Affiliations +

Proceedings Volume 2151, Diamond-Film Semiconductors; (1994) https://doi.org/10.1117/12.171763
Event: OE/LASE '94, 1994, Los Angeles, CA, United States

Abstract

Current transient spectroscopy has been used to determine the deep level structure in natural diamond up to activation energies of 1 eV. The material was activated by high-energy electrons. By varying the energy and consequently the range of the electrons in diamond, it was possible to obtain information on the depth distribution of three deep centers. The current transients were evaluated by applying a curve-fitting technique, which provides a better energy resolution than the commonly used window technique.

Citation Download Citation

Karl H. Schoenbach, T. Tessnow, Ravindra P. Joshi, Randy A. Roush, and Ralf Peter Brinkmann "Spatially resolved electron-beam induced current transient spectroscopy for deep-center characterization of diamond", Proc. SPIE 2151, Diamond-Film Semiconductors, (1 April 1994); https://doi.org/10.1117/12.171763

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