Advances in focused ion-beam repair of opaque defects

David C. Ferranti; John C. Morgan; William B. Thompson; William C. Joyce

doi:10.1117/12.175828

13 May 1994 Advances in focused ion-beam repair of opaque defects

David C. Ferranti, John C. Morgan, William B. Thompson, William C. Joyce

Proceedings Volume 2194, Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing IV; (1994) https://doi.org/10.1117/12.175828
Event: SPIE's 1994 Symposium on Microlithography, 1994, San Jose, CA, United States

Abstract

Repair of photomasks by sputter removal of chrome and other opaque materials with a focused ion beam (FIB) of gallium results in the implantation of gallium and chrome ions into the quartz substrate. The effect is localized transmission loss in the regions where material was removed. Currently, these gallium and chrome `stains' are removed using blanket etching techniques of the complete quartz substrate, thereby restoring the transmission losses. However, these techniques are unacceptable for use with phase shift masks (PSMs). This paper describes a technique that was developed to restore the localized transmission losses to acceptable levels in situ at the FIB repair system. In particular, the development of a technique that restores transmission for i-line lithography phase shift masks for 0.50 micrometers and 0.35 micrometers technology requirements is described. Information is presented describing various applications of the process including etched glass and embedded shifter type phase shift photomasks.

Citation Download Citation

David C. Ferranti, John C. Morgan, William B. Thompson, and William C. Joyce "Advances in focused ion-beam repair of opaque defects", Proc. SPIE 2194, Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing IV, (13 May 1994); https://doi.org/10.1117/12.175828

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available