Selection of materials for soft x-ray (SXR) and extreme ultraviolet (EUV) filters for space astronomy and other applications

Forbes R. Powell; Virginia Ann Drake; Bill R. Sandel; Donald G. Mitchell

doi:10.1117/12.185281

13 September 1994 Selection of materials for soft x-ray (SXR) and extreme ultraviolet (EUV) filters for space astronomy and other applications

Forbes R. Powell, Virginia Ann Drake, Bill R. Sandel, Donald G. Mitchell

Author Affiliations +

Proceedings Volume 2209, Space Optics 1994: Earth Observation and Astronomy; (1994) https://doi.org/10.1117/12.185281
Event: Space Optics '94, 1994, Garmisch, Germany

Abstract

This paper briefly reviews the more traditional materials that have been used for Soft X-Ray (SXR) and Extreme Ultraviolet (EUV) filters and then discusses several applications where new multilayer combinations of materials are being employed. The new applications include projection lithography and the detection of Energetic Neutral Atom (ENA) populations from spacecraft. Also briefly discussed is the use of polyimides for spacecraft filters.

Citation Download Citation

Forbes R. Powell, Virginia Ann Drake, Bill R. Sandel, and Donald G. Mitchell "Selection of materials for soft x-ray (SXR) and extreme ultraviolet (EUV) filters for space astronomy and other applications", Proc. SPIE 2209, Space Optics 1994: Earth Observation and Astronomy, (13 September 1994); https://doi.org/10.1117/12.185281

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