Laser writing of optical waveguides in sol-gel films

Stefano Pelli; Giancarlo C. Righini; Alessandro Verciani; Massimo Guglielmi; Alessandro Martucci; Antonio Scaglione

doi:10.1117/12.180983

28 July 1994 Laser writing of optical waveguides in sol-gel films

Stefano Pelli, Giancarlo C. Righini, Alessandro Verciani, Massimo Guglielmi, Alessandro Martucci, Antonio Scaglione

Proceedings Volume 2213, Nanofabrication Technologies and Device Integration; (1994) https://doi.org/10.1117/12.180983
Event: Integrated Optoelectronics '94, 1994, Lindau, Germany

Abstract

Laser heating can be used to fully densify selected areas of a partially densified sol-gel film deposited onto a glass substrate, thus substituting the conventional heat treatment in an oven. Here the topographic and optical characteristics of strip waveguides produced in a SiO₂-TiO₂ film by direct writing with a focused CO₂ laser are presented, and the critical parameters of the process discussed.

Citation Download Citation

Stefano Pelli, Giancarlo C. Righini, Alessandro Verciani, Massimo Guglielmi, Alessandro Martucci, and Antonio Scaglione "Laser writing of optical waveguides in sol-gel films", Proc. SPIE 2213, Nanofabrication Technologies and Device Integration, (28 July 1994); https://doi.org/10.1117/12.180983

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