Delta-doped CCDs as stable, high-sensitivity, high-resolution UV imaging arrays

Shouleh Nikzad; Michael E. Hoenk; Paula J. Grunthaner; Robert W. Terhune; Frank J. Grunthaner; Rusty Winzenread; Masoud M. Fattahi; Hsin-Fu Tseng

doi:10.1117/12.179949

22 July 1994 Delta-doped CCDs as stable, high-sensitivity, high-resolution UV imaging arrays

Shouleh Nikzad, Michael E. Hoenk, Paula J. Grunthaner, Robert W. Terhune, Frank J. Grunthaner, Rusty Winzenread, Masoud M. Fattahi, Hsin-Fu Tseng

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Proceedings Volume 2217, Aerial Surveillance Sensing Including Obscured and Underground Object Detection; (1994) https://doi.org/10.1117/12.179949
Event: SPIE's International Symposium on Optical Engineering and Photonics in Aerospace Sensing, 1994, Orlando, FL, United States

Abstract

Delta-doped CCDs have achieved stable quantum efficiency, at the theoretical limit imposed by reflection from the Si surface in the near UV and visible. In this approach, an epitaxial silicon layer is grown on a fully-processed commercial CCD using molecular beam epitaxy. During the silicon growth on the CCD, 30% of a monolayer of boron atoms are deposited nominally within a single atomic layer, resulting in the effective elimination of the backside potential well. These devices are highly uniform and have exhibited long-term stability. To achieve significantly higher total quantum efficiency, antireflection layers can be directly deposited on the device. This was demonstrated in the 250-400 nm region.

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Shouleh Nikzad, Michael E. Hoenk, Paula J. Grunthaner, Robert W. Terhune, Frank J. Grunthaner, Rusty Winzenread, Masoud M. Fattahi, and Hsin-Fu Tseng "Delta-doped CCDs as stable, high-sensitivity, high-resolution UV imaging arrays", Proc. SPIE 2217, Aerial Surveillance Sensing Including Obscured and Underground Object Detection, (22 July 1994); https://doi.org/10.1117/12.179949

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