Precision cleaning using carbon dioxide jet spray

Herbert C. Bitting

doi:10.1117/12.190155

19 October 1994 Precision cleaning using carbon dioxide jet spray

Herbert C. Bitting

Proceedings Volume 2261, Optical System Contamination: Effects, Measurements, and Control IV; (1994) https://doi.org/10.1117/12.190155
Event: SPIE's 1994 International Symposium on Optics, Imaging, and Instrumentation, 1994, San Diego, CA, United States

Abstract

Traditional solvent-based precision cleaning methods are becoming increasingly unsatisfactory due to harsher environmental regulations and more stringent cleanliness requirements. The carbon dioxide (CO₂) solid/gas jet spray cleaning technique is a superior, environmentally compatible, nonabrasive alternative cleaning technology. Experimental results demonstrating 100% removal of submicron-size particles and several types of molecular films from a variety of substrates are presented.

Citation Download Citation

Herbert C. Bitting "Precision cleaning using carbon dioxide jet spray", Proc. SPIE 2261, Optical System Contamination: Effects, Measurements, and Control IV, (19 October 1994); https://doi.org/10.1117/12.190155

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