High-precision mechanical profilometer for grazing incidence optics

Joseph R. Cerino; Kristin L. Lewotsky; Robert Paul Bourgeois; Thomas E. Gordon

doi:10.1117/12.188025

30 September 1994 High-precision mechanical profilometer for grazing incidence optics

Joseph R. Cerino, Kristin L. Lewotsky, Robert Paul Bourgeois, Thomas E. Gordon

Proceedings Volume 2263, Current Developments in Optical Design and Optical Engineering IV; (1994) https://doi.org/10.1117/12.188025
Event: SPIE's 1994 International Symposium on Optics, Imaging, and Instrumentation, 1994, San Diego, CA, United States

Abstract

A high precision mechanical profilometer (MPROS) has been designed and utilized for metrology on the Advances X-Ray Astrophysics Facility (AXAF) optic program. The instrument serves both as a measure of axial figure during the grinding phase of mirror fabrication and as the AXAF program crosscheck for axial sag error. MPROS has demonstrated an accuracy of 0.25 micrometers P-P over nominally 1 meter of travel. The design is relatively simple, employing Hewlett Packard distance measuring interferometers, an air bearing slide, and coated Zerodur reference surface. This paper will present the AXAF axial metrology requirements, MPROS design, and reference surface calibration. System performance and results will be presented and discussed.

Citation Download Citation

Joseph R. Cerino, Kristin L. Lewotsky, Robert Paul Bourgeois, and Thomas E. Gordon "High-precision mechanical profilometer for grazing incidence optics", Proc. SPIE 2263, Current Developments in Optical Design and Optical Engineering IV, (30 September 1994); https://doi.org/10.1117/12.188025

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