Noncontact thickness measurement of dielectric coatings using millimeter waves

Mark T. Lusk; Kaladhar Radhakrishnan; Hsiu C. Han; Edward S. Mansueto

doi:10.1117/12.186704

14 September 1994 Noncontact thickness measurement of dielectric coatings using millimeter waves

Mark T. Lusk, Kaladhar Radhakrishnan, Hsiu C. Han, Edward S. Mansueto

Proceedings Volume 2275, Advanced Microwave and Millimeter-Wave Detectors; (1994) https://doi.org/10.1117/12.186704
Event: SPIE's 1994 International Symposium on Optics, Imaging, and Instrumentation, 1994, San Diego, CA, United States

Abstract

Millimeter wave reflectometry offers a noncontact means of measuring the thicknesses of individual layers within multi-layer dielectric coatings on metallic substrates. Complex reflection coefficients of both TM and TE/TM waves incident on coated materials are measured over a range of frequencies and grazing angles of incidence. The sensitivity of the apparatus is such that single-layer coatings differing by 0.2 microns can be distinguished.

Citation Download Citation

Mark T. Lusk, Kaladhar Radhakrishnan, Hsiu C. Han, and Edward S. Mansueto "Noncontact thickness measurement of dielectric coatings using millimeter waves", Proc. SPIE 2275, Advanced Microwave and Millimeter-Wave Detectors, (14 September 1994); https://doi.org/10.1117/12.186704

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