Time stability of multilayer reflectivity

Lawrence Shing; Richard C. Catura

doi:10.1117/12.193137

11 November 1994 Time stability of multilayer reflectivity

Lawrence Shing, Richard C. Catura

Proceedings Volume 2279, Advances in Multilayer and Grazing Incidence X-Ray/EUV/FUV Optics; (1994) https://doi.org/10.1117/12.193137
Event: SPIE's 1994 International Symposium on Optics, Imaging, and Instrumentation, 1994, San Diego, CA, United States

Abstract

Various multilayers have been fabricated and analyzed in our laboratory over the past six years. We report effects of aging on the reflectivities of these multilayers. Several mechanisms can cause changes in multilayer performance: surface contamination, inter-layer diffusion, oxidation. We seek to study these mechanisms by modeling the measured performance with a multilayer computational code. A majority of our multilayers are Molybdenum-Silicon structures. We also have measurements on several Tungsten-Carbon multilayers, in which variations in effective 2d spacing are more readily determined because of their narrow passbands.

Citation Download Citation

Lawrence Shing and Richard C. Catura "Time stability of multilayer reflectivity", Proc. SPIE 2279, Advances in Multilayer and Grazing Incidence X-Ray/EUV/FUV Optics, (11 November 1994); https://doi.org/10.1117/12.193137

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