Optical-quality high-growth-rate, arc-jet CVD diamond

Tom A. McKenna; James T. Hoggins; John M. Trombetta; Paul Klocek; Charles E. Vaughan

doi:10.1117/12.187338

28 September 1994 Optical-quality high-growth-rate, arc-jet CVD diamond

Tom A. McKenna, James T. Hoggins, John M. Trombetta, Paul Klocek, Charles E. Vaughan

Proceedings Volume 2286, Window and Dome Technologies and Materials IV; (1994) https://doi.org/10.1117/12.187338
Event: SPIE's 1994 International Symposium on Optics, Imaging, and Instrumentation, 1994, San Diego, CA, United States

Abstract

Through a joint effort between Texas Instruments (TI) and Olin Aerospace Company (OAC), a supersonic hydrogen arc jet for high-growth-rate chemical vapor deposition (CVD) of thick layers of optical quality diamond has been developed for flat substrates as large as 8 inches in diameter and for hemispherical domes measuring 2.5 inches in diameter. An overview of this deposition system is presented, along with optical and structural analysis of the subsequently deposited material. Efforts to monitor the plasma chemistry, along with in-depth computer modeling of the gas phase chemistry and hydrodynamics of this supersonic jet, in order to produce a higher-growth-rate process while maintaining optical quality, are discussed. The current status of the overall performance of this deposition system and the resultant material are presented in relation to the requirements for high-speed-missile domes and windows.

Citation Download Citation

Tom A. McKenna, James T. Hoggins, John M. Trombetta, Paul Klocek, and Charles E. Vaughan "Optical-quality high-growth-rate, arc-jet CVD diamond", Proc. SPIE 2286, Window and Dome Technologies and Materials IV, (28 September 1994); https://doi.org/10.1117/12.187338

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