Paper
21 October 1994 Fiber optic temperature sensor using laser-annealed silicon film
Glenn Beheim, Jorge L. Sotomayor, Meg L. Tuma, Massood Tabib-Azar
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Abstract
A fiber-optic temperature sensor used a polysilicon thin-film Fabry- Perot etalon. An amorphous silicon film is sputter deposited directly onto a fiber end, crystallized using an argon ion laser, and then encapsulated by two sputter deposited films. Since silicon's refractive index is strongly temperature dependent, the location of one of the minima in the etalon's spectral reflectance can be used to determine the sensed temperature. The annealing process is a critical step in producing a stable sensor. This process is characterized, and the results of long-term sensor stability tests are presented.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Glenn Beheim, Jorge L. Sotomayor, Meg L. Tuma, and Massood Tabib-Azar "Fiber optic temperature sensor using laser-annealed silicon film", Proc. SPIE 2291, Integrated Optics and Microstructures II, (21 October 1994); https://doi.org/10.1117/12.190897
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Cited by 4 scholarly publications.
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KEYWORDS
Silicon

Sensors

Silicon films

Fabry–Perot interferometers

Fiber optics sensors

Crystals

Fiber optics

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