Recent progress in white-light interferometry

Toyohiko Yatagai

doi:10.1117/12.195930

12 December 1994 Recent progress in white-light interferometry

Toyohiko Yatagai

Proceedings Volume 2340, Interferometry '94: New Techniques and Analysis in Optical Measurements; (1994) https://doi.org/10.1117/12.195930
Event: International Conference on Interferometry '94, 1994, Warsaw, Poland

Abstract

New techniques in white light interferometry and their fringe analysis methods are described. These applications in thickness and 3-D shape measurement and defects detection are reviewed.

Citation Download Citation

Toyohiko Yatagai "Recent progress in white-light interferometry", Proc. SPIE 2340, Interferometry '94: New Techniques and Analysis in Optical Measurements, (12 December 1994); https://doi.org/10.1117/12.195930

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available