Phase stepping digital interference microscopy (PSM) image improvements by fuzzy logic algorithms

Patrick Faurous; Pascal Vabre; Paul C. Montgomery; Jean-Pierre Fillard

doi:10.1117/12.205229

28 March 1995 Phase stepping digital interference microscopy (PSM) image improvements by fuzzy logic algorithms

Patrick Faurous, Pascal Vabre, Paul C. Montgomery, Jean-Pierre Fillard

Proceedings Volume 2424, Nonlinear Image Processing VI; (1995) https://doi.org/10.1117/12.205229
Event: IS&T/SPIE's Symposium on Electronic Imaging: Science and Technology, 1995, San Jose, CA, United States

Abstract

Phase stepping digital interference microscopy (PSM) is a measuring technique that can be used for the three-dimensional analysis of small surface defects in many microelectronic applications on bulk materials and epitaxial layers. If the resulting intensities for the interference after regular phase stepping are I₁, I₂,...,I_p, where p equals 3,4,5,... according to the method, then the relief h(x,y) is given as a well known function of the I_i. We have used fuzzy logic to improve the algorithms in order to secure the final result and also to afford a possibility for a subsample resolution: first we define into the I-space N fuzzy classes in a non linear way; then the regularity needed in phase stepping leads us to define theoretical p-uples of fuzzy classes. Finally we correct the p-uples of measured values (I₁, I₂,..., I_p) according to the membershipness to the theoretical p-uples of fuzzy classes. These algorithms lead to important image improvements, offering better accuracy and a partial solution to the problem of image noise.

Citation Download Citation

Patrick Faurous, Pascal Vabre, Paul C. Montgomery, and Jean-Pierre Fillard "Phase stepping digital interference microscopy (PSM) image improvements by fuzzy logic algorithms", Proc. SPIE 2424, Nonlinear Image Processing VI, (28 March 1995); https://doi.org/10.1117/12.205229

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