Laser conditioning of LaF3/MgF2 dielectric coatings for excimer lasers

Norbert Kaiser; Bernhard Anton; H. Jaenchen; Klaus R. Mann; Eric Eva; C. Fischer; Rainer Henking; Detlev Ristau; Peter Weissbrodt; Dirk Mademann; L. Raupach; Erich J. Hacker

doi:10.1117/12.213762

14 July 1995 Laser conditioning of LaF₃/MgF₂ dielectric coatings for excimer lasers

Norbert Kaiser, Bernhard Anton, H. Jaenchen, Klaus R. Mann, Eric Eva, C. Fischer, Rainer Henking, Detlev Ristau, Peter Weissbrodt, Dirk Mademann, L. Raupach, Erich J. Hacker

Author Affiliations +

Proceedings Volume 2428, Laser-Induced Damage in Optical Materials: 1994; (1995) https://doi.org/10.1117/12.213762
Event: Laser-Induced Damage in Optical Materials: 1994, 1994, Boulder, CO, United States

Abstract

LaF₃/MgF₂-dieletric thin film combinations can be applied in optics for wavelengths down to 150 nm. Several such HR systems for a wavelength of 248 nm were investigated. In these coatings, the influence of laser conditioning on damage threshold and absorptivity was found to be remarkable. XPS- and TEM-investigations showed that the conditioning effect is related to structural and stoichiometric changes in the multilayers, especially in the near-surface-sublayers.

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Norbert Kaiser, Bernhard Anton, H. Jaenchen, Klaus R. Mann, Eric Eva, C. Fischer, Rainer Henking, Detlev Ristau, Peter Weissbrodt, Dirk Mademann, L. Raupach, and Erich J. Hacker "Laser conditioning of LaF₃/MgF₂ dielectric coatings for excimer lasers", Proc. SPIE 2428, Laser-Induced Damage in Optical Materials: 1994, (14 July 1995); https://doi.org/10.1117/12.213762

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