Effect of molecular weight distribution on the dissolution properties of novolac blends

Pavlos C. Tsiartas; Logan L. Simpson; Anwei Qin; C. Grant Willson; Robert D. Allen; Val J. Krukonis; Paula M. Gallagher-Wetmore

doi:10.1117/12.210347

9 June 1995 Effect of molecular weight distribution on the dissolution properties of novolac blends

Pavlos C. Tsiartas, Logan L. Simpson, Anwei Qin, C. Grant Willson, Robert D. Allen, Val J. Krukonis, Paula M. Gallagher-Wetmore

Author Affiliations +

Proceedings Volume 2438, Advances in Resist Technology and Processing XII; (1995) https://doi.org/10.1117/12.210347
Event: SPIE's 1995 Symposium on Microlithography, 1995, Santa Clara, CA, United States

Abstract

The dissolution properties of nearly monodisperse fractions of metacresol novolac resin in aqueous potassium hydroxide solutions has been investigated. A relationship between the molecular weight of the fractions and dissolution rate was examined for a range of developer concentrations. Deliberate and calculated blending of the various fractions afforded an opportunity to investigate the fundamental relationship between molecular weight and dissolution characteristics over a range of developer concentrations.

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Pavlos C. Tsiartas, Logan L. Simpson, Anwei Qin, C. Grant Willson, Robert D. Allen, Val J. Krukonis, and Paula M. Gallagher-Wetmore "Effect of molecular weight distribution on the dissolution properties of novolac blends", Proc. SPIE 2438, Advances in Resist Technology and Processing XII, (9 June 1995); https://doi.org/10.1117/12.210347

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