White-light spacial frequency multiplication using soft xrays

Max Wei; Eric M. Gullikson; James H. Underwood; T. Kenneth Gustafson; David T. Attwood Jr.

doi:10.1117/12.221679

25 September 1995 White-light spacial frequency multiplication using soft x rays

Max Wei, Eric M. Gullikson, James H. Underwood, T. Kenneth Gustafson, David T. Attwood Jr.

Proceedings Volume 2516, X-Ray Microbeam Technology and Applications; (1995) https://doi.org/10.1117/12.221679
Event: SPIE's 1995 International Symposium on Optical Science, Engineering, and Instrumentation, 1995, San Diego, CA, United States

Abstract

We have patterned a 0.25-micron period grating in SAL-601 photoresist using soft x-ray white-light spatial frequency multiplication. The configuration is that of a grating interferometer using two transmission gratings having the same period ((Lambda) equals 0.5 micron) and fabricated by electron beam lithography and lift-off. The first transmission grating splits an incoming x-ray beam into two paths and the second grating, operating in higher order, combines the two beams. A standing wave pattern is obtained at the intersection of the two beams and recorded by a photoresist coated substrate. This patterning technique has the advantage of multiplying the spatial frequency of the interferometer gratings by an even integer factor. Furthermore, the recording geometry is insensitive to both the longitudinal and transverse coherence of the illumination. Synchrotron bending magnet radiation from the advanced light source located at the Lawrence Berkeley National Laboratory was used as the source. The grating interferometer geometry has been used in the past to record white-light interference fringes using visible and ultraviolet light sources. We have used a two-grating interferometer to provide an initial demonstration of white-light spatial frequency doubling at soft x-ray wavelengths. By using this technique with shorter period parent gratings, it should be possible to patten gratings with higher resolution than electron beam lithography.

Citation Download Citation

Max Wei, Eric M. Gullikson, James H. Underwood, T. Kenneth Gustafson, and David T. Attwood Jr. "White-light spacial frequency multiplication using soft x rays", Proc. SPIE 2516, X-Ray Microbeam Technology and Applications, (25 September 1995); https://doi.org/10.1117/12.221679

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
7 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Diffraction gratings

Spatial frequencies

Interferometers

X-rays

Electron beam lithography

Photoresist materials

Beam splitters

Show All Keywords

Keywords/Phrases

Search In:

Publication Years