Synthesis and measurement of Os-Si multilayer mirrors optimized for the wavelength 380 A

Igor V. Kozhevnikov; L. L. Balakireva; Anatoli I. Fedorenko; I. A. Kopealets; Vladimir E. Levashov; A. N. Stetsenko; I. I. Struk; Alexander V. Vinogradov

doi:10.1117/12.221637

25 September 1995 Synthesis and measurement of Os-Si multilayer mirrors optimized for the wavelength 380 Å

Igor V. Kozhevnikov, L. L. Balakireva, Anatoli I. Fedorenko, I. A. Kopealets, Vladimir E. Levashov, A. N. Stetsenko, I. I. Struk, Alexander V. Vinogradov

Author Affiliations +

Proceedings Volume 2520, Soft X-Ray Lasers and Applications; (1995) https://doi.org/10.1117/12.221637
Event: SPIE's 1995 International Symposium on Optical Science, Engineering, and Instrumentation, 1995, San Diego, CA, United States

Abstract

Flat and spherical Os - Si multilayer mirrors were synthesized and studied. Measured normal incidence reflectivity was 20% at the wavelength lambda equals 380 angstrom. The effect of impurities in silicon layers on the multilayer reflectivity in the ultrasoft x-ray region is discussed.

Citation Download Citation

Igor V. Kozhevnikov, L. L. Balakireva, Anatoli I. Fedorenko, I. A. Kopealets, Vladimir E. Levashov, A. N. Stetsenko, I. I. Struk, and Alexander V. Vinogradov "Synthesis and measurement of Os-Si multilayer mirrors optimized for the wavelength 380 Å", Proc. SPIE 2520, Soft X-Ray Lasers and Applications, (25 September 1995); https://doi.org/10.1117/12.221637

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available